22

Nitrogen implantation in (100)-β-SiC layers grown on Si substrate

Year:
1995
Language:
english
File:
PDF, 1.38 MB
english, 1995
25

Ion Implantation in β-SiC Layers Grown on (100)Si

Year:
1994
Language:
english
File:
PDF, 947 KB
english, 1994
28

Growth of A β-SiC Filli on a Si Substrate by a Direct Carbonization Method

Year:
1991
Language:
english
File:
PDF, 2.11 MB
english, 1991